UNIVERSITÀ DEGLI STUDI DI CATANIAFACOLTÀ DI INGEGNERIA
DIPARTIMENTO DI INGEGNERIA ELETTRICA, ELETTRONICADIPARTIMENTO DI INGEGNERIA ELETTRICA, ELETTRONICA E DEI SISTEMI
Dottorato di Ricerca in Ingegneria Elettronica, Automatica e del Controllo di Sistemi Complessi
XXIV ciclo
XXI XXI Brain Storming Day Brain Storming Day –– 19 19 OttobreOttobre 2010 2010 AngelaAngela BeninatoBeninatoAngela Angela BeninatoBeninato
Research and education activities during Ph.D.
Integrated micro and nano sensors- Inductive microsensors with magnetic microbeads; - Microfluidic with ferrofluidic materials;- Nanotechnologies.
TutorTutorProf. Ing. Salvatore Baglio
CoordinatorCoordinatorProf. Ing. Luigi Fortuna
OUTLINE & RESEARCH ACTIVITY PLANNING1 Theoretical backgroundTheoretical background
INDUCTIVE MICROSENSORS FERROFLUIDIC DEVICES NANOTECHNOLOGIES
Y Theoretical background and state of the art.Characterization of existingdevices.
Theoretical background and state of the art.Design, simulations and layouts.
f
2 Theoretical background
Modelling of new devices.Design of suitableconditioning circuits.
Characterization of devices Development modellingY2 Theoretical background
and state of the art.Training on SEM-FIB equipments.
Characterization of devicesand tests.Design and fabrication ofmicrofluidic system.
Development, modellingand characterization ofnew devices.
Y 3
q py
Realization of Lab-on-chipdevice
Design and fabrication ofmicrofluidic devices for
Design and fabrication ofnanodevices for thedevice. microfluidic devices for
magnetic immuno-assay.nanodevices for the detection of weakmagnetic fields.
INDUCTIVE MICROSENSORS
M ti i
Magnetic immuno-assay
diLL
1'2
Δ
dtdi
LL
LL
LNNvout1
'2
2'2
1
221
12 ⎟⎟⎠
⎞⎜⎜⎝
⎛ Δ−ℜ+⎟⎟
⎠
⎞⎜⎜⎝
⎛ Δ−ℜ
=
dtdi
LL
LL
NNLLd
dvS out 12
'2
2'2
1
2121'
212
2)/(
⎥⎦
⎤⎢⎣
⎡⎟⎟⎠
⎞⎜⎜⎝
⎛ Δ−ℜ+⎟⎟
⎠
⎞⎜⎜⎝
⎛ Δ−ℜ
ℜ+ℜ=
Δ=
22 ⎦⎣ ⎠⎝⎠⎝
INDUCTIVE MICROSENSORSgold
~ 100 µm~ 1.0 µm~ 0.7 µm
metal2
goxide
oxide~ 0.7 µm
500 Å
5300 Å
1000 Å~ 0.6 µm
polysilicon
metal1oxide
oxide
1.9 µm
5300 Å600 Å
n- - 508 µm
substrate
polysilicon
1.9 µm
600 Å5300 Å
500 Å 1000 Å
Sensors
Thermal structures
INDUCTIVE MICROSENSORS
HeaterHeaterSpacing = 10 µmWidth = 8, 9, 10, 20 µmSeveral number of tracksSeveral number of tracksRh= 8.7, 10.3, 28.9, 30, 33.6, 40.6, 60 kΩ
ThermoresistanceThermoresistanceFixed in dimensionsRt ≈140 kΩ
HeaterThermoresistance
INDUCTIVE MICROSENSORS
THERMORESISTANCETHERMORESISTANCE
Thermoresistancein polysilicon:
R 130Ω
yLength= 280 µm
Width= 7µm
M l1 R= 130ΩV= 70 V
Metal1
Metal2
Thermometer DeltaOhm HD2107 1Thermometer DeltaOhm HD2107.1Accuracy ±0.01°C
Resolution 0.01°C
Probe TP49AC
Accuracy ±0.25°CV-I converter Non-inverting amplifier
INDUCTIVE MICROSENSORS
THERMORESISTANCETHERMORESISTANCE
Sensitivity= -484.24 Ω/°CResolution= 0.2167 °CUncertainly=±0.333 °C
INDUCTIVE MICROSENSORS
HEATERHEATERm m m m m m m m
= 28
5 µm
10 µ
m
= 34
5 µm
10 µ
m
= 40
5 µm
10 µ
m
= 22
5 µm
10 µ
m
= 16
5 µm
10 µ
m
= 28
3 µm
8 µm
= 28
5 µm
9 µm
= 29
5 µm
20 µ
m
Leng
th=
Wid
th=
Leng
th=
Wid
th=
Leng
th=
Wid
th=
Leng
th=
Wid
th=
Leng
th=
Wid
th=
Leng
th=
Wid
th=
Leng
th=
Wid
th=
Leng
th=
Wid
th=
INDUCTIVE MICROSENSORS
HEATERHEATER
Length = 285 µmWidth = 10 µm
Sensitivity= 0.6523 °C/VUncertainly=±1.9 °C
FERROFLUIDIC DEVICES
PATTERN
The device consist of:a glass plate with de ionized water in which•a glass plate with de-ionized water in which
there is a drop of ferrofluid;•a matrix of 16 electromagnets to move the drop;•16 permanent magnets located on the bottom•16 permanent magnets located on the bottom
of the electromagnets.
ELECTROMAGNETS
PERMANENT MAGNETSPERMANENT MAGNETS
FERROFLUIDIC DEVICES
PATTERN
Q1 on, Q2 off +I,Q1 off, Q2 on -IQ1 off, Q2 off I=0
FERROFLUIDIC DEVICES
PATTERN
C1, C2 H1C3 H2
C1 H1C2, C3 H2
C1 H1C2 H2C3 H3
FERROFLUIDIC DEVICES
PATTERN
FERROFLUIDIC DEVICES
PATTERN
4
5
2
3
mbe
r of m
easures
1
Nu
0
50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 100010501100115012001250130013501400145015001550160016501700175018002000
Minimum time step between the input signals for two consecutive electromagnets [ms]
78
e34567
r of m
easure
0123
numbe
r
5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 85
time of permanence in a electromagnet [s]
CCONTINUING EDUCATION PROGRAM:
Fotonica e Nanotecnologie (Priolo-Romano)IMU 2009, Trento ,First Biosensing Conference, 9-16 Novembre 2009Training on SEM-FIB equipment, TESCAN, Brno, Czech RepublicSeminars offered for the PhD School
RESEARCH ACTIVITY:
IC prototypes realization at ST Microelectronics (Catania);IC prototypes realization at ST Microelectronics (Catania);Characterization of devices;
Modelling simulation and characterization of new ferrofluidic devices;Modelling, simulation and characterization of new ferrofluidic devices;Design and fabrication of microfluidic devices for magnetic immuno-assay;
Training on SEM-FIB equipments;g q p ;Design and fabrication of nanodevices for the detection of weak magnetic
fields.
LIST OF PUBLICATIONS
BOOKSBOOKS
1. B. Andò, S. Baglio, A. Beninato, Magnetic fluids for bio‐medical application, in “Advances in Biomedical Sensing, Measurements, Instrumentation and Systems” Springer – Verlag Publisher.
JOURNALS
2. B. Andò, S. Baglio, A. Beninato, S. La Malfa, N. Pitrone, Advanced Educational Tools in Measurement and Sensors: f t it i t t ti fl id I t J l f Ed ti d I f ti T h l i Ifrom remote monitoring systems to magnetic fluids, Inter. Journal of Education and Information Technologies, Issue 1, Volume 3, 75‐84, 2009
3. B. Andò, A. Ascia, S. Baglio, A. Beninato, The “One drop" FERROFLUIDIC PUMP with Analog control: "FP1_A", Sensors & Actuators: A. Physical, Volume 156, Issue 1, November 2009, Pages 251‐256.
4 B A dò A A i S B li A B i t A F fl idi I ti l S l iti th R i ff t4. B. Andò, A. Ascia, S. Baglio, A. Beninato, A Ferrofluidic Inertial Sensor exploiting the Rosensweig effect, Instrumentation and Measurement, IEEE Transactions on , vol.59, no.5, pp.1471‐1476, May 2010
5. B. Andò, S. Baglio, A. Beninato, G. Fallica, V. Marletta, Development of an integrated inductive sensor for magnetic immunoassay in “lab on chip” device, Word Scientific 2010
6 B A dò S B li A B i t B h i A l i f F fl idi G P f t d f th6. B. Andò, S. Baglio, A. Beninato, Behavior Analysis of Ferrofluidic Gyroscope Performances, accepted for the publication on Sensors & Actuators: A. Physical, 2010
7. B. Andò, S. Baglio, A. Beninato, An IR methodology to assess the behavior of Ferrofluidic transducers. Case of study: a contact‐less driven pump, accepted for the publication on IEEE sensors, 2010
CONFERENCES
8. B. Ando’, A. Beninato, S. La Malfa, N. Pitrone, Didactic tool assisting visually impaired students during laboratory sessions, the 7th WSEAS International Conference on Education and Educational Technology, EDU’08, pp. 190‐193, 2008.
9. B. Ando’, A. Ascia, S. Baglio, A. Beninato, S. La Malfa, N. Pitrone, Sensing a physical movement with a ferrofluidic device, the 4th WSEAS International Conference on Remote Sensing (Remote’08), pp. 99‐102, 2008.
10. B. Ando’, S. Baglio, A. Beninato, A Novel Non‐invasive Implementation of Pumping Mechanism in PreexistingCapillary, IEEE sensors 2009, pp. 1349 ‐ 1353, 2009
11. B. Andò, S. Baglio, A. Beninato, Behavior Analysis of a Ferrofluidic Gyroscope Performances, Proceedings of theEurosensors XXIII conference, Volume 1, Issue 1, September 2009, Pages 116‐119.
12. B. andò, S. Baglio, A. Beninato, G. Fallica, V. Marletta, N. Pitrone, Analysis and design of inductive biosensors formagnetic immuno assay, XIX IMEKO World Congress Fundamental and Applied Metrology, 2009, pp.1729‐1733.
13. B. Andò, A. Ascia, S. Baglio, A. Beninato, Innovative Ferrofluidic Inertial Sensor exploiting the Rosensweig effect,IEEE, IMTC2009, pp. 1419‐1422, 2009.
14. B. Andò, S. Baglio, A. Beninato, G. Fallica, C. Galati, V. Marletta, L. Renna, Development of an integrated inductivesensor for magnetic immunoassay in lab on chip device, Physcon 2009, pp. 189, 2009
15. B. Andò, S. Baglio, A. Beninato, V. Marletta, An integrated differential inductive sensor implementing bio‐immunoassay, IEEE ‐ Biosensing 2009
16. B. Andò, S. Baglio, A. Beninato, A spike‐like ferrofluidic inertial sensor, I2MTC 2011 (submitted)
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