Istituto per la Microelettronica e Microsistemi- CNR Unità di Napoli

CommessaCommessa: : Microsistemi optoelettronici in silicio e tecnologie compatibiliMicrosistemi optoelettronici in silicio e tecnologie compatibili

ORGANICO: ORGANICO: 7 ricercatori7 ricercatori 4 tecnici4 tecnici 1 amministrativo1 amministrativo 1 post-doc, 8 dottorandi, 2 borsisti / contrattisti1 post-doc, 8 dottorandi, 2 borsisti / contrattisti

Main facilities @ IMM-NA

•ISO 6/7 clean room (150 m2)- Plasma deposition & etching systems- Thermal & e-beam evaporation- DC-RF Sputtering system- Optical & e-beam Lithography- Thermal treatment systems

• Characterization labs (500 m2) - Optoelectronic device characterization- Optical & Structural Material characterization- Electrical characterization

• Optoelectronic device and circuits design lab- Process analysis- Electronic & Photonic behavior - Thermo-structural analysis

Input portOutput

port

P-Simirrors

Air beam splitter

Arm #3

Arm #1Arm

#2

Arm #0

Luigi Sirleto – Mantova 24 maggio 2007

Silicon Photonics

Raman light sourcesPhotodetectors:

Internal Photoemission

n-SiSubstrate

n-Si(λ/2 thick)

Schottky Metal

Si3N4 coating

n-Si(3λ/4 thick)

SiO2

(λ/4 thick)

Optical modulators: PBG and Negative Refraction

Silicon chip