CNR-Istituto Nazionale di Ottica Applicata (Firenze) Interferometric microscopy for diamond surface...
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CNR-Istituto Nazionale di Ottica Applicata (Firenze)
Interferometric microscopy for diamond surface characterization
Maurizio Vannoni
CNR-Istituto Nazionale di Ottica ApplicataFirenze
CNR-Istituto Nazionale di Ottica Applicata (Firenze)
Interferometric microscopy for diamond surface characterization
Maurizio Vannoni
CNR-Istituto Nazionale di Ottica ApplicataFirenze
Interferometric microscopy for diamond surface characterization
CNR – National Institute for Applied Optics in Florence
CNR-Istituto Nazionale di Ottica Applicata (Firenze)
CNR-Istituto Nazionale di Ottica Applicata (Firenze)
Principal activities of the laboratory
- Optical metrology (interferometry, optical testing)
- Holography
- Optical engineering using ray tracing
Interferometric microscopy for diamond surface characterization
CNR-Istituto Nazionale di Ottica Applicata (Firenze)
The clean room laboratory
Interferometric microscopy for diamond surface characterization
CNR-Istituto Nazionale di Ottica Applicata (Firenze)
The clean room laboratory
Interferometric microscopy for diamond surface characterization
CNR-Istituto Nazionale di Ottica Applicata (Firenze)
Occhio
Pellicola d'aria (interferometro di Newton)
Interferometric microscopy for diamond surface characterization
Interferometry physical principles
Eye
CNR-Istituto Nazionale di Ottica Applicata (Firenze)
Interferograms fringes obtained with monochromatic light: physical interpretation
Double pass
Interferometric microscopy for diamond surface characterization
Transmitted wave
Reflected wave Test Sample
CNR-Istituto Nazionale di Ottica Applicata (Firenze)
Occhio
Cubosemiriflettente
Specchio
Specchio
Sorgente (lampada)
Diffusore (vetro smerigliato)
Interferometro di Michelson
Interferometric microscopy for diamond surface characterization
White-light interferometry physical principle
Mirror
Eye
Beam splitterMirror
Diffuser
Light source (lamp)
CNR-Istituto Nazionale di Ottica Applicata (Firenze)
Occhio
Cubo semiriflettente
Occhio
Interferometric microscopy for diamond surface characterization
Eye
Eye
Beam splitter
CNR-Istituto Nazionale di Ottica Applicata (Firenze)
Interferometric microscopy for diamond surface characterization
CNR-Istituto Nazionale di Ottica Applicata (Firenze)
Versione per microscopio
CCD
Obiettivo
Sorgente
Interferometric microscopy for diamond surface characterization
Configurazione Mirau
CCD
Sorgente
Light source
Light source
Microscopic objective
WHITE LIGHT MICROINTERFEROMETER
Nominal objective specifications at 1X
NA Lat. Work. Field Slope res. dist. of view (deg) (μm) (mm) (mm)Michelson1X 0.03 11.8 8.5 7.0x5.3 0.752.5X 0.075 4.72 10.3 2.82x2.11 1.895X 0.130 2.72 9.3 1.41x1.06 3.77
Mirau10X 0.300 1.18 7.4 0.70x0.53 7.5120X 0.400 0.88 4.7 0.35x0.26 14.850X 0.550 0.64 3.4 0.14x0.11 33.4
Available in the laboratory
SYSTEM PERFORMANCE
Vertical scan range 100 μm
Vertical resolution 0.1 nm
Lateral resolution 0.64 to 11.8 μm depending on objective
Data scan rate up to 2.4 μm/sec
White light micro interferometers (WLMI) compared to AFM typical instruments
WLMI
Advantages:
-large field of view
-high accuracy on z axis (sub nanometer)
-no contact measurement
Disadvantages:
-optical resolution on x and y axes (microns)
AFM
Advantages:
-high accuracy on all three axes (nanometres)
Disadvantages:
- small field of view (typically maximum 100 microns)
- contact measurement
CNR-Istituto Nazionale di Ottica Applicata (Firenze)
Interferometric microscopy for diamond surface characterization
Diamond characterization examples
Characterization of diamond grains
CNR-Istituto Nazionale di Ottica Applicata (Firenze)
Characterization of the single grain on the diamond surface
CNR-Istituto Nazionale di Ottica Applicata (Firenze)
Characterization of the single grain: some pictures
CNR-Istituto Nazionale di Ottica Applicata (Firenze)
Characterization of the two sides of a polycrystalline diamond
EL100 sample 1 side A EL100 sample 1 side B
EL100 sample 2 side A EL100 sample 2 side B
CNR-Istituto Nazionale di Ottica Applicata (Firenze)
Characterization of the two sides of a polycrystalline diamond
EL100 sample 3 side A EL100 sample 1 side B
EL50 sample 191 side A EL50 sample 191 side B
CNR-Istituto Nazionale di Ottica Applicata (Firenze)
Characterization of the surface swelling in ion-beam damaged diamonds
(courtesy of Ettore Vittone and Paolo Olivero)
CNR-Istituto Nazionale di Ottica Applicata (Firenze)
The previous images have been obtained working in close collaboration with the INFN of Florence (S. Lagomarsino, G. Parrini, S. Sciortino) in the framework of a national experiment of INFN (Radiation Active Pixel -Silicon On DIAmond) aimed to develop diamond-based Silicon On Insulator material by wafer-bonding
In the short term, roughness characterizations of silicon and diamond are helping to select surfaces more likely to bond together and to calculate the needed pressure to allow the bonding.
Other collaborations for diamond projects:
-Università di Torino: Ettore Vittone and staff-Università di Padova: Paolo Rossi and staff-Università di Firenze: Pier Andrea Mandò and staff