pf Heusler CPP-GMR (TDK)!! The highest MR ratio (28.8%@RT) is the best record in all of the reports

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Transcript of pf Heusler CPP-GMR (TDK)!! The highest MR ratio (28.8%@RT) is the best record in all of the reports

  • !"#$%&'!()*+,-./

    0!"#1*23-450!

    678797:!

    ;?@A()BCD!

    ERLEFG#!H0'IJKL 2009M7N9~11OP6GQRS0TUVBCWX!

    Research

  • Y7Z7X7[!

    \]F#$%^'IJ#! !!"#$%&'!-_`a!

    !bcde-*fg!

    !!"#1-*fg!

    h]ijklm!

    n]+,o./opq! !!"#rs!

    !!"#tu!

    !!"#vw!

    !!"#1-x1!

    y]z{|}*~-!

  • !"#$%&'!-_!

    x7!!!"#!

    G'$%&'!! x-|>e45!

    (s, p x)

    Q'!! d45! (d, f x)

    7! x!

    |!

    !"#! d!

    !"#!

    x1|! d45!

    d! x1|45!

    bc'c%0!

    !"#1!

  • bc!0Ra!

    x7!

    !"#!

    x71!

    !"#1!

    e-

    S Js = J!- J"

    J e = J!+ J"

     ¡¢lF = 1 ~ 10 nm @A£¤!

    !"#¥¦§¢lsf = 1 ~ 10 nm ¨de@A!

    !100 ~ 1000 nm ©de@A!

    bc!0R*! dª«X¬!

    !"#­®!!"#¥¦§!

    ¦¯°! bcde-±²³´µ!

  • !"#$%&'!µ¶!

    7·¸F!! GMR / TMR¹Kº! d»#E0! d¼½¾MRAM! !"#$¿#!À!

    6ÁÂÃ! Är|Ã! !"#ÅÃ!

    Æ7Ç!

    ÈÉ7ÇÊ!

    !"#­®! !"#vw?¥¦! !"#$¿#!ËÌ0!

    !"#ÍÎÏÐÑÒ! ZÓ?ÔÓde! ÕÖ×Ø?dÙÚe! ÛܾÝÞߨde!

    È+7àÊ!

    á=dâãäåGMR! $#QRdâãäåTMR! !"#tu?æç!

    dèé?^Fbê'!! dëìí! !"#î0Räå! |Þßd!

    (7)!

    ÈÆ7ïÊ!

    6!"#rsÆï!

    6dÙÚeÆï!

    ¨deð°!

    µ?bcñ0ò#ó!

    ÈôõX¬Ê!

    ö÷ø¹%X¬!

    !"#¸Rù!

    úû?ºK$!

    bcü!

  • ý°¼·Ý¢! þ*·!'*ÿ!dNsSs*! "#-$%&'()*$+,*%-]!

    ¹Kº¢! GMR or TMR.Ò$%&' /03]!

    100 GbS12K$/inch2 34!

    1 bit 56+100 nm 7Ú38!

    90º·!'º¿Fù!

    3.5!"#$%&'()*!

  • 90º·!'Ó:;±?@*YA!

    B?@! ùF'!R0!

    +!

    , - . / 0 1! " # $% &$ ' ()

    * +!

    30%/year!

    60%/year!

    100%/year!

    30%/year!

    2345&!

    6'(789:;<

    MR45&!

    )=">?@GMR45&!

    ABC6'(7

    TMR45&DTi-O, Al-OE!

    FGHI-.

    TMR45&DMgOE!

  • JKKL+1M%N?OPQRSSSSSSSSS!

    á=dâãäå! GMR*YA!

    !"#$%&'!*Yp!

    HDD :;±?@GMR45&:kP!

  • Nobel week, December 2007!

    ノーベル賞講演にて 12月8日

    スウェーデンロイヤルアカデミーによるレセプションにて 12月7日

    授賞式にて 12月10日

    晩餐会にて 12月10日

  • FGk·¸F!X¬!(1)!

    CPP (Current-Perpendicular-to-Planel¤ÓHIJx) K!

    PA(B)¢!"#rsL!

    sub µm ~ µm 4Mxs!!"#!

    8Mxs!

    ¨de@A!A

    ÿNO!

    or

    I

    ÿNO!= PQ°¢$#QRdâãäåTMR!

    !77@7A¢á=dâãäåCPP-GMR!

    ¨de@A!B

    MA

    MB

    RÒS¢MRAM»R! 7777TU¹Kº!

    dâãäåMR! *=VW!

    !R

    R PA$PB !"¢!

  • FGk·¸F!X¬!(2)!

    Lateral structureÓXX¬K!

    VG

    ¨de@A! ¨de@A!

    I

    Je = J! + J" = 0

    Js = J! - J" # 0

    ©de°!

    !"#$%!

    Non-local geometry

    YZ!"#1! !"#rsx1!

    !"#tu!

    !"#vw¥¦!

    RÒS¢!"#$¿#!À!

    sub µm ~ µm

  • !"#$%&'!·¸F!*e["

    \]FG^_!

    !"#rsSpin polarization!

    !"#tu!Spin injectionE!

    !"#vw!Spin relaxationE!

    -a!$%äL`a!"#1U[$P!

    §bc!"#11a]!

  • 6!"#rs()!

    dwd¢!

    x*!"#rsL!

    Fe: +0.40

    Co: +0.35 Ni : +0.23

    ¨de!3d =ì@A!

    *!"#rsL!

    90˼ÀR; P = 1!

    îF!¿0Ø@! 7NiMnSb, Co2MnSi, Co2MnAl, etc.

    =ì@AeÆ! 7CrO2, Fe3O4, LSMO, etc.!

  • 90˼ÀR¢îF!¿0Ø@!

    C1 b structure!

    XYZ

    L2 1 structure!

    X2YZ (NiMnSb etc.)

    (Co2MnSi, Co2MnGe etc.)

    half-Heusler full-Heusler

    Co2MnSi (CMS)

    Half-metallic energy gap : 400 – 600 meV

    Highly ordered L21-structure is

    easily obtained.

    High Tc (~ 985K)

  • ホイスラー TMR の発展

  • îF!¿0TMR-MgO-TMR

    CoFeB/MgO

  • fâã-TMR

    ghÓç56+*âãiRA-! âãªLMR ratio*fg!

    fâã!jkTMR*lm! !"#tuäL*lm!

    Gïk!

    90˼ÀR! îF!¿0Ø@}*~!

    TMR

    CPP-GMR

    !"#tun!

    CCP-NOL

    (Toshiba)! Heusler CPP-GMR

    (Seagate)!

    Heusler CPP-GMR

    (HGST)!

    Target

    2 Tbit/in2!

    3d Ferro CPP-GMR

    (NHK)! 3d Ferro CPP-GMR

    (Toshiba)!

    3d Ferro CPP-GMR

    (Fujitsu)!

    M R

    r a ti

    o [

    % ]!

    RA [!·µm2]!

    MgO-MTJ

    Heusler CPP-GMR

    (TDK)!

  • ! The highest MR ratio (28.8%@RT) is the

    best record in all of the reports to date.

    Fully-epitaxial growth in CMS/Ag/CMS

    Co2MnSi/Ag/Co2MnSi fully-epitaxial CPP-GMR device!

    Iwase et al., Appl. Phys. Express, 2, 063003 (2009).

  • 書き込み

    読み出し

    fâã7opq! 6âã7orq!

    ‘0’ ‘1’ 磁化反転

    メモリセル配列

    d¿#^sÝ'»!¼½¾MRAM*tu0!

  • 1. vVw0x1*fl!

    2. e¸¿xÛyz¢MTJÃ*{e! 7!- âã|}~TMR*{e!

    7!- vVw0x1*{e!

    3. S12K$*=! 7!- fx1vVw0! 7!- Å)*4! 7!- CMOS˾0!

    !"#tudèé!

    mRAM:nopq!

  • AP P

    P AP

    Hex: External magnetic field

    Hani: Anisotropy field

    P : Spin polarization factor

    !: Damping parameter

    ": Gyromagnetic ratio

    Ms: Saturation magnetization

    d : Layer thickness

    !"#1!}d45!"#tudèé!

  • HId!TMR / CPP-GMR

    Fully epitaxial

    8O!

    HIdO!

    HIdO!

    ÿNO$#QRë!

    F7!

    FePt(001)

    Au(001) or MgO(001)

    FePt(001)

    MgO(001)

    Au(001)

    6dÙÚed*e!

    *,dÙÚe!"#tudèé(! 6ç!

    HId*.e!

    Ý!'$4!

  • Current-induced domain wall motion

    Spin-transfer effect

    MFM observation of domain wall movement

    by spin polarized current in a permalloy

    nanowire without external magnetic field

    (A. Yamaguchi et al., PRL 92 (2004) 077205.)

    !"#1-d^FbêK'!!

    Current-induced vortex core motion

    (S. Kasai et al., PRL 101 (2008) 237203.)

    Time-resolved M-TXM observation of

    vortex core motion driven by ac current

    in a permalloy disk

  • !"#1-x1!

    ©D"! I

    rHst!

    uHst! !"#1! x1$!

    !"#1! x1+!

    !"#î0Räå!

    x71!

    !"#ÍÎ! ÏÐÑÒ!

    !"#1!

    ]vSS)="vcw!

    !"#î0Räå! !"#î0Räå!

  • HIdFePt/Auó!|á=!"#î0Räå!

    Electrical detection of giant spin

    Hall effect at room temperature

    T. Seki et al., Nature Materials, 7 (2008) 125.

    Spin Hall angle ~ 0.1

  • BBC!"#1*23-45!

    M

    A)="xy89! z{|}Y!

    )="v!

    A02

    !"#1-! bc¹%X¬!

    A03

    !"#1-! |Æe!

    A04

    !"#1-! xÆe!

    273! Æ7e! W 45!

    A01

    !"#n*! ¡¢?2£!

    A05

    !"#1*! W -45!

    !"#$%&'! ()#*+&'!

    ,-#$%&'! !.#/012'!

    34#$&'! 56#%&'!

    &7#$&'! 89#:;

  • z{|}*~\!

    ~(Cu, Ag, Au, etc.)!

    jt! (Si, GaAs, InAs, etc.)

    $%6?! !)%~!

    (Co2MnSi, etc.)

    )="!

    ?¤¥!|¦§!"#rs*¨+!

    ?!"#1*6äL©3!

    ?6!"#rs()*x,ª

    77half-metallicity *«¬

    ?ÔÓ*X¬|}~!"#,ª

    77­Ã®¯e

    77É°R*±²!

  • z{|}*~h!

    )="v:!

    )="v:!

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    ! !

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    )="v:v! )1=1"11"1*!

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    )="%?!

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    HIz{! )1=1"11?1*!

    )="v:! 1111s!

    !"#1³´*!

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    !"#1!f¹^FbêK'!*º»

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